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Nanoindentation FAQs
How much does Poisson's ratio affect my nanoindentation results?
Poisson's ratio doesn't affect the calculation of hardness at all, and the calculation of Young's modulus is only weakly sensitive to Poisson's ratio. A generous uncertainty in Poisson's ratio (0.25 +/- 0.1) leads to a relative uncertainty in Young's modulus of +/- 5%.
How thin of a film can be tested by nanoindentation?
In most practical situations, nanoindentation can be used to measure the properties of films that are 100nm or thicker. This limitation is dictated by the appropriateness of the analytic models used to get mechanical properties, not the resolution of the fundamental measurements of load and displacement.
How to change default input values (KLA nanoindenters)?
Default values for inputs can be changed by editing and saving the test method. From the main menu, select "Method File" then "Edit". Locate the input(s) and change the default values. If inputs are "actuator specific" then values must be changed at the bottom of the screen. Finally, save the method under a new name, and use the revised method for future testing.